Verteq Superclean Spin Rinse Dryer
Verteq Superclean Spin Rinse Dryer
TOOL ID: SRD-01
The SuperClean 1600-3 is a single cassette, front-loading, programmable rinser/dryer used to rinse and dry round substrates that are 100mm or 150mm in diameter. The system rinses to a DI water resistivity of ~12 Mohm before the heated nitrogen drying cycle commences.
Verteq Superclean Spin Rinse Dryer
