Veeco Savannah S200 ALD
Veeco Savannah S200 ALD
TOOL ID: ALD-03
Savannah is equipped with high-speed pneumatic pulse valves to enable our unique Exposure Mode for thin film deposition on Ultra High Aspect Ratio substrates. This proven precision thin film coating methodology can be used to deposit conformal, uniform films on substrates with aspect ratios of greater than > 2000:1. Savannah is capable of holding substrates of different sizes up to 200mm. The Savannah thin film deposition systems are equipped with heated precursors lines and the option to add up to six lines.
Veeco Savannah S200 ALD
