Spinner and Solvent Processing Benches
Spinner and Solvent Processing Benches
SU-8/PDMS Resist Spinner
TOOL ID: SPN-07
- Maximum speed of 10,000 rpm
- User friendly programmable interface
- Programmable step functions (up to 10 steps per recipe)
- Programmable process control
- Wafer sizes from pieces through 150mm
Spinner and Solvent Processing Benches
