SMI MOCVD
SMI MOCVD
TOOL ID: CVD-04
The system is owned and managed by the Jariwala Group at UPenn. Inquiries into using the system should be made to staff via an email at qnf-process@lists.seas.upenn.edu .
The systems is a Metal-organic chemical vapor deposition system configured with the following precursors: (CH3)2Se, Mo(CO)6, (CH)3 In, H2, H2S.
SMI MOCVD
