Genesis HMDS Vapor Prime Oven
Genesis HMDS Vapor Prime Oven
TOOL ID: OVN-01
While wet chemical surface modification can be done, vapor phase deposition has become the preferred method for coating surface as the process environment can be tightly controlled. Due to liquid surface tension, the wet process can have poor contact between the solution and the surface, especially when the surface is textured with small features. Another problem with wet processing, or solution phase deposition, is this process typically uses water.
Standard recipes include HMDS priming and image reversal with ammonia chemistry. Other chemistry and related SAM coatings can be developed on request.
Genesis HMDS Vapor Prime Oven
