MPT Corp. RTP-600S Rapid Thermal Annealer
MPT Corp. RTP-600S Rapid Thermal Annealer
TOOL ID: BE-05
The RTP-600S system is an advanced bench-top rapid thermal processing system with multi-gas capabilities. The system processes wafers up to 6″ in diameter. The integrated process control system features real-time graphics, recipe management, data acquisition and display and has a comprehensive diagnostic function.
The system is configured for ≤800°C processing with thermocouple and has the option to flow in nitrogen as a process gas.
MPT Corp. RTP-600S Rapid Thermal Annealer
