Kurt J. Lesker PVD 75 PRO-Line E-Beam Evaporator
Kurt J. Lesker PVD 75 PRO-Line E-Beam Evaporator
TOOL ID: PVD-04
- Load locked system
- Four pocket e-beam at 10kV
- Cryo pumped with automated interface
- Automated control of film thickness
- Pieces through 150mm wafers
- Wafer platen rotation
Kurt J. Lesker PVD 75 PRO-Line E-Beam Evaporator
