Kurt J. Lesker Nano 36 Thermal Evaporator
Kurt J. Lesker Nano 36 Thermal Evaporator
TOOL ID: PVD-01
- Three thermal sources
- Turbo pumping automated interface
- Automated control of film thickness
- Pieces through 150mm wafers
- Wafer platen rotation
Kurt J. Lesker Nano 36 Thermal Evaporator
