KLA Tencor P7 Profilometer – 2
KLA Tencor P7 2D&3D/stress profilometer
TOOL ID: MET-02
The P-7 stylus profiler offers industry leading measurement repeatability for reliable measurement performance. The surface measurement system has 150 mm scan length standard – the only stylus profiler on the market to offer long scan capability without the need for stitching. The UltraLite® sensor includes dynamic force control, excellent linearity, and the highest vertical resolution making it the best sensor available on a surface measurement system. Finally, this stylus profiler’s surface measurement system includes point-and-click operation and the productivity package to offer the easiest to use tool on the market with the features required by university, R&D, and production environments.
The P-7 Stylus profiler is capable of addressing a wide range of surface measurements and applications:
- Thin film step height measurements
- Thick film step height measurements
- Photo resist / soft films
- Etched trench depth
- Materials characterization for surface roughness and waviness
- Surface curvature and form
- 2D stress of thin films
- Dimensional analysis and surface texture
- 3D imaging of various surfaces
- Flatness or curvature
- Defect review and defect analysis
