JA Woollam V VASE Ellipsometer
J.A. Woollam V VASE Spectroscopic Ellipsometer
TOOL ID: MET-06
The VASE is one of the most accurate and versatile ellipsometer for research on all types of materials: semiconductors, dielectrics, polymers, metals, multi-layers, and more.
It combines high accuracy and precision with a wide spectral range up to 300 to 1100nm. Variable wavelength and angle of incidence allow flexible measurement capabilities including:
- Reflection and Transmission Ellipsometry
- Generalized Ellipsometry
- Reflectance (R) intensity
- Transmittance (T) intensity
- Cross-polarized R/T
- Depolarization
- Scatterometry
- Mueller-matrix
JA Woollam V VASE Ellipsometer
