IntlVac NanoQuest 1 IBE
IntlVac NanoQuest 1 IBE
NanoQuest 1 is an ion mill connected to Ar gas and capable of etching small mm-scale samples up to full 4″ wafers. The tool is equipped with a secondary ion mass spectroscopy (SIMS) unit and is capable of etch with manual endpoint detection. The stage has a tilt motor that allows for etch angles between 0 (directly facing the beam) and 90 degrees (parallel to the beam).
The tool in QNF is connected to Ar gas and can etch samples up to 4″ wafer. Available beam voltages are: 300 V, 400 V, 450 V, and 500 V
IntlVac NanoQuest 1 IBE
