Denton Vacuum Explorer 14 Sputterer
Denton Vacuum Explorer 14 Sputterer
TOOL ID: PVD-05
- Open load system in sputter-down configuration
- Two DC guns
- Able to co-sputter one DC and one RF source
- One RF gun
- Cryo pumped with automated interface
- Automated control of film thickness
- Pieces through 150mm wafers
- Wafer platen rotation with cooling
- Substrate cleaning
Denton Vacuum Explorer 14 Sputterer
