ABM 3000HR Mask Aligner
ABM HTG 3000HR Mask Aligner
Tool ID: MA-03
Location: Bay 6
The ABM mask aligner is a manual and versatile mask aligner with top-side alignment and substrate capabilities from 100mm down to small pieces. This tool is used primarily for negative resist exposure and alignment of PDMS components for bonding. The flexible range of the microscope makes this tool also well utilized for top-side alignment of small pieces. The 350W Hg bulb provides an approximate 365nm output intensity of 20 mW/cm² and 400nm output intensity of 45 mW/cm², with ± 3-5% uniformity across a wafer.
ABM 3000HR Mask Aligner
